Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181356 | Micromechanical component for a pressure and inertial sensor device | Jochen Reinmuth, Johannes Classen | 2024-12-31 |
| 12077429 | Micromechanical sensor device and corresponding production method | Jochen Reinmuth, Johannes Classen | 2024-09-03 |
| 12031820 | Micromechanical system, method for operating a micromechanical system | Johannes Classen, Christof Schwenk, Holger Rumpf, Joerg Braeuer, Torsten Ohms | 2024-07-09 |
| 11860184 | Micromechanical structure and micromechanical sensor | Cristian Nagel, Johannes Classen, Rolf Scheben, Rudy Eid | 2024-01-02 |
| 11536742 | Method for operating a micromechanical inertial sensor | Amin Jemili, Christian Marschall | 2022-12-27 |
| 11215632 | Micromechanical inertial sensor | Johannes Classen | 2022-01-04 |
| 10775170 | Method for manufacturing a MEMS element | Joerg Braeuer, Christian Hoeppner | 2020-09-15 |
| 9791273 | Micromechanical sensor | Chunyu Wang | 2017-10-17 |
| 9581613 | Micromechanical acceleration sensor | Guenther-Nino-Carlo Ullrich | 2017-02-28 |
| 9428378 | Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component | Friedjof Heuck, Heiko Stahl, Jullian Gonska, Reinhard Neul | 2016-08-30 |
| 9097736 | Micromechanical component and method for manufacturing a micromechanical component | Johannes Classen, Arnd Kaelberer | 2015-08-04 |
| 8915138 | Inertial sensor with overlapping torsional springs | Guenther-Nino-Carlo Ullrich, Frank Fischer, Carsten Geckeler | 2014-12-23 |
| 8901679 | Micromechanical structure, in particular sensor arrangement, and corresponding operating method | Johannes Classen, Mirko Hattass, Daniel Christoph Meisel | 2014-12-02 |
| 8796791 | Hybrid intergrated component and method for the manufacture thereof | Axel Franke, Patrick Wellner | 2014-08-05 |
| 8596122 | Micromechanical component and method for operating a micromechanical component | Johannes Classen | 2013-12-03 |
| 8573059 | Acceleration sensor having an electrode bridge | Arnd Kaelberer, Christian Bierhoff | 2013-11-05 |
| 8402826 | Micromechanical z-sensor | Johannes Classen | 2013-03-26 |
| 8393215 | Micromechanical acceleration sensor having an open seismic mass | Heiko Stahl, Dietrich Schubert | 2013-03-12 |
| 8336382 | Acceleration sensor and method for its manufacture | Johannes Classen, Arnd Kaelberer, Patrick Wellner, Dietrich Schubert | 2012-12-25 |
| 8333113 | Triaxial acceleration sensor | Johannes Classen | 2012-12-18 |
| 8272268 | Triaxial acceleration sensor | Johannes Classen, Arnd Kaelberer | 2012-09-25 |
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably | Johannes Classen, Arnd Kaelberer, Patrick Wellner, Dietrich Schubert | 2011-02-01 |
| 7730783 | Acceleration sensor | Johannes Classen, Markus Heitz, Fouad Bennini | 2010-06-08 |