Issued Patents All Time
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7196782 | Methods and systems for determining a thin film characteristic and an electrical property of a specimen | John Fielden, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2007-03-27 |
| 7156854 | Lens delivery system | David A. Downer, Thomas M. Heyman | 2007-01-02 |
| 7139083 | Methods and systems for determining a composition and a thickness of a specimen | John Fielden, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2006-11-21 |
| 7130029 | Methods and systems for determining an adhesion characteristic and a thickness of a specimen | Dan Wack, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2006-10-31 |
| 7106425 | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen | Gary Bultman, Ady Levy, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2006-09-12 |
| 7006235 | Methods and systems for determining overlay and flatness of a specimen | Ady Levy, Mehrdad Nikoonahad, Gary Bultman, Dan Wack, John Fielden | 2006-02-28 |
| 6987572 | Methods and systems for lithography process control | Suresh Lakkapragada, Matt Hankinson, Ady Levy | 2006-01-17 |
| 6950196 | Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen | John Fielden, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2005-09-27 |
| 6946394 | Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process | John Fielden, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2005-09-20 |
| 6919957 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen | Mehrdad Nikoonahad, Ady Levy, Gary Bultman, Dan Wack, John Fielden | 2005-07-19 |
| 6917433 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process | Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2005-07-12 |
| 6917419 | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen | John Fielden, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2005-07-12 |
| 6891627 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Gary Bultman, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2005-05-10 |
| 6891610 | Methods and systems for determining an implant characteristic and a presence of defects on a specimen | Mehrdad Nikoonahad, Ady Levy, Gary Bultman, Dan Wack, John Fielden | 2005-05-10 |
| 6829559 | Methods and systems for determining a presence of macro and micro defects on a specimen | Gary Bultman, Ady Levy, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2004-12-07 |
| 6818459 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Dan Wack, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2004-11-16 |
| 6812045 | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation | Mehrdad Nikoonahad, Ady Levy, Gary Bultman, Dan Wack, John Fielden | 2004-11-02 |
| 6806951 | Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen | Dan Wack, Ady Levy, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +1 more | 2004-10-19 |
| 6782337 | Methods and systems for determining a critical dimension an a presence of defects on a specimen | Dan Wack, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2004-08-24 |
| 6694284 | Methods and systems for determining at least four properties of a specimen | Mehrdad Nikoonahad, Ady Levy, Gary Bultman, Dan Wack, John Fielden | 2004-02-17 |
| 6689519 | Methods and systems for lithography process control | Matt Hankinson, Ady Levy, Suresh Lakkapragada | 2004-02-10 |
| 6673637 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Dan Wack, Ady Levy, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2004-01-06 |
| 6633831 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Mehrdad Nikoonahad, Ady Levy, Gary Bultman, Dan Wack, John Fielden | 2003-10-14 |
| 6551174 | Supplying slurry to a polishing pad in a chemical mechanical polishing system | Brian J. Brown | 2003-04-22 |
| 6332470 | Aerosol substrate cleaner | Boris Fishkin | 2001-12-25 |