Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420378 | Substrate processing apparatus and method for controlling dressing of polishing member | Yasumasa Hiroo | 2025-09-23 |
| 12387584 | Monitoring system, monitoring method, and program | — | 2025-08-12 |
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| D1028755 | Tracking device | — | 2024-05-28 |
| 11954992 | Monitoring system, monitoring method, and program | — | 2024-04-09 |
| 11945075 | Polishing apparatus and polishing member dressing method | Yasumasa Hiroo | 2024-04-02 |
| 11883922 | Substrate processing apparatus | Yuki Watanabe | 2024-01-30 |
| 11833636 | Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate | Katsuhide Watanabe, Yoichi Shiokawa, Akira Nakamura | 2023-12-05 |
| 11759913 | Polishing method and polishing apparatus | Yoichi Shiokawa, Toshimitsu Sasaki, Yuki Watanabe, Nachiketa CHAUHAN | 2023-09-19 |
| 11478893 | Polishing method and polishing apparatus | Toshimitsu Sasaki | 2022-10-25 |
| 11458589 | Polishing apparatus and polishing member dressing method | Yasumasa Hiroo | 2022-10-04 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2022-09-20 |
| 11268577 | Vehicle cam damper structure | Koji Sato, Akio Handa, Dai Arai, Eiichi Suzuki, Takeyuki Kariyasu | 2022-03-08 |
| 11260496 | Polishing method and polishing apparatus | Yuki Watanabe, Toshimitsu Sasaki | 2022-03-01 |
| 11195729 | Substrate polishing apparatus and method | Yuki Watanabe | 2021-12-07 |
| 10916455 | Flattening method and flattening apparatus | Kazuto Yamauchi, Yasuhisa Sano, Hideyuki Hara, Junji Murata | 2021-02-09 |
| 10828747 | Substrate polishing apparatus and method | Yasumasa Hiroo | 2020-11-10 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2020-05-26 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa +2 more | 2020-02-11 |
| 10399203 | Polishing method and polishing apparatus | Yoichi Kobayashi, Masaki Kinoshita, Yoichi Shiokawa | 2019-09-03 |
| 10297475 | Flattening method and flattening apparatus | Kazuto Yamauchi, Yasuhisa Sano, Hideyuki Hara, Junji Murata | 2019-05-21 |
| 9999955 | Polishing apparatus and polished-state monitoring method | Yoichi Kobayashi, Katsuhide Watanabe, Yoichi Shiokawa, Masaki Kinoshita | 2018-06-19 |
| 9550269 | Polishing device and polishing method | Yoichi Shiokawa, Yoichi Kobayashi | 2017-01-24 |
| 9390986 | Polishing apparatus and polishing method | Yoichi Kobayashi | 2016-07-12 |
| 9233449 | Polishing method, polishing apparatus and GaN wafer | Yasuhisa Sano, Kazuto Yamauchi, Junji Murata, Shun Sadakuni | 2016-01-12 |