Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9233449 | Polishing method, polishing apparatus and GaN wafer | Yasuhisa Sano, Kazuto Yamauchi, Junji Murata, Keita Yagi | 2016-01-12 |
| 8912095 | Polishing method, polishing apparatus and polishing tool | Yasuhisa Sano, Kazuto Yamauchi, Junji Murata, Takeshi Okamoto, Keita Yagi | 2014-12-16 |