| 12400823 |
Electron source, method of manufacturing the same, and electron beam apparatus using the same |
Toshiaki Kusunoki, Noriaki Arai, Tomihiro Hashizume |
2025-08-26 |
| 12394585 |
Electron source, electron gun, and charged particle beam device |
Shuhei Ishikawa, Kenji Tanimoto, Takashi Doi, Soichiro Matsunaga, Hiroshi Morita +2 more |
2025-08-19 |
| 11894211 |
Electron beam apparatus and method for controlling electron beam apparatus |
Erina Kawamoto, Soichiro Matsunaga, Souichi Katagiri, Takashi Doi, Tetsuya Sawahata +1 more |
2024-02-06 |
| 11508544 |
Thermoelectric field emission electron source and electron beam application device |
Soichiro Matsunaga, Souichi Katagiri, Aki Takei, Hajime Kawano, Takashi Doi |
2022-11-22 |
| 11322329 |
Electron source, method for manufacturing the same, and electron beam device using the same |
Toshiaki Kusunoki, Tomihiro Hashizume, Noriaki Arai, Hiromitsu Seino, Minoru Kaneda +2 more |
2022-05-03 |
| 10903037 |
Charged particle beam device |
Shuhei Ishikawa, Kenji Tanimoto, Hajime Kawano, Hideo Todokoro, Souichi Katagiri +2 more |
2021-01-26 |
| 10804084 |
Vacuum apparatus |
Souichi Katagiri |
2020-10-13 |
| 10707046 |
Electron source and electron beam device using the same |
Toshiaki Kusunoki, Takashi Ohshima, Tomihiro Hashizume, Noriaki Arai, Yoichi Ose |
2020-07-07 |
| 10586674 |
Field emission electron source, method for manufacturing same, and electron beam device |
Toshiaki Kusunoki, Tomihiro Hashizume, Takashi Ohshima, Yusuke Sakai, Yoichi Ose +1 more |
2020-03-10 |
| 10522319 |
Electron beam apparatus |
Noriaki Arai, Toshiaki Kusunoki, Takashi Ohshima, Tomihiro Hashizume, Yusuke Sakai |
2019-12-31 |
| 9837243 |
Ion pump and charged particle beam device using the same |
Takeshi Kawasaki, Takashi Ohshima, Souichi Katagiri |
2017-12-05 |
| 8772735 |
Charged particle beam apparatus, and method of controlling the same |
Takashi Ohshima, Souichi Katagiri, Shigeru Kokubo, Hideo Todokoro |
2014-07-08 |
| 8426835 |
Charged particle radiation device |
Takashi Ohshima, Souichi Katagiri, Masashi Kimura |
2013-04-23 |
| 8319193 |
Charged particle beam apparatus, and method of controlling the same |
Takashi Ohshima, Souichi Katagiri, Shigeru Kokubo, Hideo Todokoro |
2012-11-27 |