Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278120 | Substrate treatment device | Minami NAKAMURA | 2025-04-15 |
| 12165886 | Substrate processing apparatus and substrate processing method | Daisuke Matsushima, Masaya KAMIYA | 2024-12-10 |
| 12138671 | Substrate treatment device | Minami NAKAMURA, Daisuke Matsushima | 2024-11-12 |
| 12109597 | Substrate treatment device | Daisuke Matsushima, Satoshi Nakamura, Masaya KAMIYA, Minami NAKAMURA | 2024-10-08 |
| 12097541 | Substrate processing apparatus | Daisuke Matsushima, Masaya KAMIYA | 2024-09-24 |
| 12074055 | Substrate treatment device | Masaya KAMIYA | 2024-08-27 |
| 12005482 | Substrate treatment device | Daisuke Matsushima, Masaya KAMIYA | 2024-06-11 |
| 11948812 | Cooling device, substrate treatment device, cooling method, and substrate treatment method | — | 2024-04-02 |
| 11784040 | Substrate treatment device | Daisuke Matsushima, Masaya KAMIYA | 2023-10-10 |
| 11609491 | Reflective mask cleaning apparatus and reflective mask cleaning method | Daisuke Matsushima, Masafumi Suzuki, Satoshi Nakamura | 2023-03-21 |
| 11355337 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Daisuke Matsushima, Haruka Nakano, Ivan Petrov Ganachev | 2022-06-07 |
| 10773425 | Imprint template manufacturing apparatus and imprint template manufacturing method | Satoshi Nakamura, Daisuke Matsushima, Masayuki Hatano, Hiroyuki Kashiwagi | 2020-09-15 |
| 10734217 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Daisuke Matsushima, Haruka Nakano, Ivan Petrov Ganachev | 2020-08-04 |
| 10668496 | Imprint template treatment apparatus | Satoshi Nakamura, Daisuke Matsushima, Masayuki Hatano, Hiroyuki Kashiwagi | 2020-06-02 |
| 10111313 | Plasma processing apparatus and plasma processing method | Takeharu MOTOKAWA, Tokuhisa Ooiwa, Tomoaki Yoshimori, Makoto Karyu, Yoshihisa Kase +1 more | 2018-10-23 |
| 9513557 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Katsuhiro Yamazaki | 2016-12-06 |
| 8999612 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Katsuhiro Yamazaki | 2015-04-07 |