Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237174 | Etching method | Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Kenji Ishikawa, Masaru Hori | 2025-02-25 |
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Atsushi Sekiguchi, Tatehito Usui, Soichiro Eto, Shigeru Nakamoto +1 more | 2024-07-30 |
| 11915951 | Plasma processing method | Hiroyuki Kobayashi, Nobuya Miyoshi, Tatehito Usui, Naoyuki Kofuji, Yutaka Kouzuma +4 more | 2024-02-27 |
| 11557463 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more | 2023-01-17 |
| 11515167 | Plasma etching method and plasma processing apparatus | Sumiko Fujisaki, Yoshihide Yamaguchi, Hiroyuki Kobayashi, Kohei Kawamura, Yutaka Kouzuma +1 more | 2022-11-29 |
| 11276579 | Substrate processing method and plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Yutaka Kouzuma, Masaru Izawa | 2022-03-15 |
| 11217454 | Plasma processing method and etching apparatus | Hiroto Otake, Hiroyuki Kobayashi, Kohei Kawamura, Masaru Izawa | 2022-01-04 |
| 10937635 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more | 2021-03-02 |
| 10872779 | Plasma etching method and plasma etching apparatus | Nobuya Miyoshi, Hiroyuki Kobayashi, Kohei Kawamura, Kazumasa Ookuma, Yutaka Kouzuma +1 more | 2020-12-22 |
| 10418254 | Etching method and etching apparatus | Naoyuki Kofuji, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura, Masaru Izawa +2 more | 2019-09-17 |
| 10325781 | Etching method and etching apparatus | Satoshi Sakai, Masaru Izawa, Nobuya Miyoshi, Hiroyuki Kobayashi, Yutaka Kouzuma +2 more | 2019-06-18 |
| 10290472 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more | 2019-05-14 |
| 10192720 | Plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kenji Maeda, Satoshi Sakai, Masaru Izawa | 2019-01-29 |
| 9110315 | Optical device, modulator module, and method for manufacturing the optical device | Akira Nakanishi, Hideo Arimoto, Hiroaki Hayashi, Shigeki Makino | 2015-08-18 |
| 8891570 | Optical semiconductor device | Kouji Nakahara, Yuki WAKAYAMA, Takeshi Kitatani | 2014-11-18 |
| 8855160 | Horizontal-cavity surface-emitting laser | Koichiro Adachi, Yasunobu Matsuoka, Toshiki Sugawara, Shinji Tsuji | 2014-10-07 |
| 8774571 | Optical device, optical module, and method for manufacturing optical device | Shigeki Makino, Hideo Arimoto | 2014-07-08 |
| 7738521 | Semiconductor laser device | Shin'ichi Nakatsuka, Tsukuru Ohtoshi, Akihisa Terano, Hitoshi Nakamura, Shigehisa Tanaka | 2010-06-15 |
| 7711229 | Optical integrated device and manufacturing method thereof | Takeshi Kitatani, Takashi Shiota, Shigeki Makino, Toshihiko Fukamachi | 2010-05-04 |
| 7636378 | Semiconductor laser diode | Takeshi Kitatani, Koichiro Adachi, Masahiro Aoki | 2009-12-22 |
| 7583714 | Vertical cavity surface emitting semiconductor laser device | Kouji Nakahara, Koichiro Adachi, Takashi Shiota, Tomonobu Tsuchiya | 2009-09-01 |
| 7577319 | Semiconductor optical device and manufacturing method thereof | Shigeki Makino, Takeshi Kitatani | 2009-08-18 |
| 7542208 | Light collecting device and light collecting mirror | Xin Gao, Hiroyuki Ohashi | 2009-06-02 |
| 7502403 | Semiconductor laser and optical module | Koichiro Adachi, Hideo Arimoto | 2009-03-10 |
| 7340142 | Integrated optoelectronic device and method of fabricating the same | Takashi Shiota, Tomonobu Tsuchiya, Takeshi Kitatani, Masahiro Aoki | 2008-03-04 |