Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7675606 | Lithographic apparatus and method | Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Gerardus Johannes Joseph Keijsers, Klaus Simon, Johannes Theodoor De Smit +6 more | 2010-03-09 |
| 7562686 | Method and system for 3D alignment in wafer scale integration | Keith Frank Best, Geoffrey Norman Phillipps, Franciscus Godefridus Casper Bijnen, Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel +1 more | 2009-07-21 |
| 7531040 | Resist recovery method | Keith Frank Best, Cheng-Qun Gui, Alexander Friz | 2009-05-12 |
| 7501215 | Device manufacturing method and a calibration substrate | Keith Frank Best, Alexander Friz | 2009-03-10 |
| 7442476 | Method and system for 3D alignment in wafer scale integration | Keith Frank Best | 2008-10-28 |
| 7410880 | Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate | Keith Frank Best, Alexander Friz | 2008-08-12 |
| 7320847 | Alternate side lithographic substrate imaging | Keith Frank Best, Alexander Friz | 2008-01-22 |
| 7256865 | Methods and apparatuses for applying wafer-alignment marks | Keith Frank Best, Cheng-Qun Gui, Alexander Friz | 2007-08-14 |
| 7133117 | Dual sided lithographic substrate imaging | Keith Frank Best, Shyam Shinde | 2006-11-07 |
| 7130049 | Method of measurement, method for providing alignment marks, and device manufacturing method | Keith Frank Best, Alexander Friz | 2006-10-31 |
| 7113258 | Lithographic apparatus | Henricus Wilhelmus Maria Van Buel, Keith Frank Best, Joeri Lof, Edwin Ross Shafer | 2006-09-26 |
| 7041996 | Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby | Keith Frank Best, Alexander Friz, Henricus Wilhelmus Maria Van Buel | 2006-05-09 |
| 7019814 | Lithographic projection mask, device manufacturing method, and device manufactured thereby | Keith Frank Best, Alexander Friz | 2006-03-28 |
| 6914664 | Lithographic apparatus, alignment method and device manufacturing method | Keith Frank Best, Alexander Friz, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui | 2005-07-05 |
| 6844244 | Dual sided lithographic substrate imaging | Keith Frank Best, Shyam Shinde | 2005-01-18 |