Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027411 | Integrated tool lift | Paul Albert Avanzino, Daniel Arthur Brown, Jason Lee Treadwell | 2024-07-02 |
| 11495486 | Integrated tool lift | Paul Albert Avanzino, Daniel Arthur Brown, Jason Lee Treadwell | 2022-11-08 |
| 11127610 | Split chamber assembly | — | 2021-09-21 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Ian Kenworthy +2 more | 2020-05-26 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Ian Kenworthy +2 more | 2019-08-27 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Ian Kenworthy +2 more | 2018-08-14 |
| 8895452 | Substrate support providing gap height and planarization adjustment in plasma processing chamber | Yen-Kun Wang, John Holland | 2014-11-25 |
| 8784948 | Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber | Rajinder Dhindsa, Scott Stevenot | 2014-07-22 |
| 8043430 | Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber | Rajinder Dhindsa, Scott Stevenot | 2011-10-25 |
| 7211170 | Twist-N-Lock wafer area pressure ring and assembly | — | 2007-05-01 |
| 6936135 | Twist-N-Lock wafer area pressure ring and assembly for reducing particulate contaminant in a plasma processing chamber | — | 2005-08-30 |
| 6926803 | Confinement ring support assembly | — | 2005-08-09 |