Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4462863 | Microwave plasma etching | Shigeru Nishimatsu, Keizo Suzuki, Ken Ninomiya, Sadayuki Okudaira, Hiroji Saida | 1984-07-31 |
| 4430138 | Microwave plasma etching apparatus having fan-shaped discharge | Keizo Suzuki, Sadayuki Okudaira, Shigeru Nishimatsu | 1984-02-07 |
| 4409520 | Microwave discharge ion source | Hidemi Koike, Noriyuki Sakudo, Katsumi Tokiguchi | 1983-10-11 |
| 4393333 | Microwave plasma ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Hidemi Koike, Humihiko Nakashima | 1983-07-12 |
| 4330384 | Process for plasma etching | Sadayuki Okudaira, Keizo Suzuki, Shigeru Nishimatsu | 1982-05-18 |
| 4316090 | Microwave plasma ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Hidemi Koike | 1982-02-16 |
| 4298419 | Dry etching apparatus | Keizo Suzuki, Sadayuki Okudaira, Shigeru Nishimatsu | 1981-11-03 |