Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Norbert Bowering +7 more | 2008-05-06 |
| 7323703 | EUV light source | William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, Norbert Bowering, John Viatella +1 more | 2008-01-29 |
| 7291853 | Discharge produced plasma EUV light source | Igor V. Fomenkov, William N. Partlo, Gerry Blumenstock, Nortbert Bowering, Xiaojiang Pan +1 more | 2007-11-06 |
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Norbert Bowering +7 more | 2005-12-06 |
| 6815700 | Plasma focus light source with improved pulse power system | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Norbert Bowering +1 more | 2004-11-09 |
| 6566667 | Plasma focus light source with improved pulse power system | William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx | 2003-05-20 |
| 6477193 | Extreme repetition rate gas discharge laser with improved blower motor | William N. Partlo | 2002-11-05 |
| 6442181 | Extreme repetition rate gas discharge laser | William N. Partlo, Richard M. Ness, Richard L. Sandstrom, Stuart L. Anderson, Alex P. Ivaschenko +4 more | 2002-08-27 |
| 6425559 | Gas laser chamber with vertical vibration isolator | Alex P. Ivaschenko, William N. Partlo, Palash P. Das | 2002-07-30 |
| 6034978 | Gas discharge laser with gas temperature control | Richard C. Ujazdowski, Robert A. Shannon, Dmitry Berger, William N. Partlo, Tom A. Watson +9 more | 2000-03-07 |
| 6026103 | Gas discharge laser with roller bearings and stable magnetic axial positioning | Igor V. Fomenkov, William N. Partlo | 2000-02-15 |