Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272571 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12272570 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12211709 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2025-01-28 |
| 11694911 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2023-07-04 |
| 10267728 | Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system | Dengliang Yang, Ilia Kalinovski, David Cheung | 2019-04-23 |
| 9564344 | Ultra low silicon loss high dose implant strip | David Cheung, Jack Kuo, Ilia Kalinovski, Zhao Li, Guhua Yao +2 more | 2017-02-07 |
| 9397011 | Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper | Yuk-Hong Ting, David Cheung | 2016-07-19 |
| 8721797 | Enhanced passivation process to protect silicon prior to high dose implant strip | David Cheung, Jack Kuo, Ilia Kalinovski, Ted Li, Andrew Yao | 2014-05-13 |
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2011-07-19 |
| 7513062 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2009-04-07 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2005-10-18 |