| 12237148 |
Plasma processing assembly using pulsed-voltage and radio-frequency power |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +4 more |
2025-02-25 |
| 12057292 |
Feedback loop for controlling a pulsed voltage waveform |
Leonid Dorf, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov |
2024-08-06 |
| 11848176 |
Plasma processing using pulsed-voltage and radio-frequency power |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +3 more |
2023-12-19 |
| 11776789 |
Plasma processing assembly using pulsed-voltage and radio-frequency power |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +4 more |
2023-10-03 |
| 11699572 |
Feedback loop for controlling a pulsed voltage waveform |
Leonid Dorf, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov |
2023-07-11 |
| 11668553 |
Apparatus and method for controlling edge ring variation |
Sathyendra Ghantasala, Leonid Dorf, Peter Muraoka, Denis M. Koosau, Rajinder Dhindsa +1 more |
2023-06-06 |
| 11482402 |
Methods and apparatus for processing a substrate |
Leonid Dorf, Rajinder Dhindsa, Olivier Luere |
2022-10-25 |
| 11462389 |
Pulsed-voltage hardware assembly for use in a plasma processing system |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +5 more |
2022-10-04 |
| 11462388 |
Plasma processing assembly using pulsed-voltage and radio-frequency power |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +4 more |
2022-10-04 |
| 10923321 |
Apparatus and method of generating a pulsed waveform |
Leonid Dorf, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov |
2021-02-16 |
| 10916408 |
Apparatus and method of forming plasma using a pulsed waveform |
Leonid Dorf, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov |
2021-02-09 |
