Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964865 | Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus | Cédric Désiré Grouwstra, Nicolaas Rudolf Kemper, Norbertus Josephus Martinus Van Den Nieuwelaar, Hua Li, Marinus Jochemsen | 2018-05-08 |
| 9329491 | Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus | Cédric Désiré Grouwstra, Nicolaas Rudolf Kemper, Norbertus Josephus Martinus Van Den Nieuwelaar, Hua Li, Marinus Jochemsen | 2016-05-03 |
| 8856084 | Data processing method and device | Gilles Huron | 2014-10-07 |
| 8394572 | Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus | Marcus Theodoor Wilhelmus Van Der Heijden, Marco Koert Stavenga, Patrick Wong, Frederik Johannes Van Den Bogaard, David Bessems +1 more | 2013-03-12 |
| 8264235 | Test structure for detection of defect devices with lowered resistance | Roberto Maurizio Gonella | 2012-09-11 |
| 8129097 | Immersion lithography | Richard Moerman, Cédric Désiré Grouwstra, Michel Franciscus Johannes Van Rooy | 2012-03-06 |
| 8114568 | Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus | Marcus Theodoor Wilhelmus Van Der Heijden, Marco Koert Stavenga, Patrick Wong, Frederik Johannes Van Den Bogaard, David Bessems +1 more | 2012-02-14 |
| 7688083 | Analogue measurement of alignment between layers of a semiconductor device | Albert Van De Goor | 2010-03-30 |
| 4301759 | Control system, particularly for use on ships | — | 1981-11-24 |