Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271921 | Method and apparatus for determining surface layer thickness using continuous multi-wavelength surface scanning | — | 2007-09-18 |
| 7199874 | Darkfield inspection system having a programmable light selection array | Christopher F. Bevis, Paul Sullivan, George Kren | 2007-04-03 |
| 7106432 | Surface inspection system and method for using photo detector array to detect defects in inspection surface | Evan R. Mapoles, Grace Hsiu-Ling Chen, Christopher F. Bevis | 2006-09-12 |
| 7061598 | Darkfield inspection system having photodetector array | Christopher F. Bevis | 2006-06-13 |
| 7009696 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, Daniel Kavaldjiev +1 more | 2006-03-07 |
| 7002677 | Darkfield inspection system having a programmable light selection array | Christopher F. Bevis, Paul Sullivan, George Kren | 2006-02-21 |
| 6781688 | Process for identifying defects in a substrate having non-uniform surface properties | George Kren, Mehdi Vaez-Iravani | 2004-08-24 |
| 6686996 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, Daniel Kavaldjiev +1 more | 2004-02-03 |
| 6414752 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, Daniel Kavaldjiev +1 more | 2002-07-02 |
| 5528366 | Precision determination for molecular weights | — | 1996-06-18 |
| 5121054 | Method and apparatus for determining the angular velocity of a shaft using a pair of proximity sensors | Edward H. Phillips | 1992-06-09 |