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Calibration system for an extreme ultraviolet light source |
Liane Manuela Matthes, Rilpho Ludovicus Donker, Martinus Hendrikus Antonius Leenders |
2024-12-24 |
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Target expansion rate control in an extreme ultraviolet light source |
Robert Jay Rafac |
2021-08-17 |
| 10674591 |
Target expansion rate control in an extreme ultraviolet light source |
Robert Jay Rafac |
2020-06-02 |
| 10314153 |
Target expansion rate control in an extreme ultraviolet light source |
Robert Jay Rafac |
2019-06-04 |
| 9980359 |
Systems and methods for controlling EUV energy generation using pulse intensity |
Robert Jay Rafac |
2018-05-22 |
| 9832854 |
Systems and methods for stabilization of droplet-plasma interaction via laser energy modulation |
Robert Jay Rafac |
2017-11-28 |
| 9820368 |
Target expansion rate control in an extreme ultraviolet light source |
Robert Jay Rafac |
2017-11-14 |
| 9755396 |
EUV LPP source with improved dose control by combining pulse modulation and pulse control mode |
Paul Frihauf, Andrew Liu, Spencer Rich, Matthew R. Graham, Steven Chang +1 more |
2017-09-05 |
| 9713240 |
Stabilizing EUV light power in an extreme ultraviolet light source |
Robert Jay Rafac |
2017-07-18 |
| 9536631 |
Systems and methods to avoid instability conditions in a source plasma chamber |
— |
2017-01-03 |
| 9426872 |
System and method for controlling source laser firing in an LPP EUV light source |
Robert Jay Rafac |
2016-08-23 |
| 9240664 |
System and method for extending gas life in a two chamber gas discharge laser system |
— |
2016-01-19 |
| 9000403 |
System and method for adjusting seed laser pulse width to control EUV output energy |
James H. Crouch, Matthew R. Graham, Robert Jay Rafac |
2015-04-07 |
| 8873600 |
System and method for high accuracy gas refill in a two chamber gas discharge laser system |
Rui Jiang, Joshua Jon Thornes, Kevin M. O'Brien |
2014-10-28 |
| 8767791 |
System and method for controlling gas concentration in a two-chamber gas discharge laser system |
— |
2014-07-01 |
| 8681832 |
System and method for high accuracy gas inject in a two chamber gas discharge laser system |
— |
2014-03-25 |
| 8598552 |
System and method to optimize extreme ultraviolet light generation |
Paul Frihauf, Matthew R. Graham, Steven Chang, Wayne J. Dunstan |
2013-12-03 |
| 8411720 |
System and method for automatic gas optimization in a two-chamber gas discharge laser system |
Kevin M. O'Brien, Joshua Jon Thornes, Rui Jiang |
2013-04-02 |
| 8254420 |
Advanced laser wavelength control |
Olav Haugan |
2012-08-28 |