Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1073758 | Baffle for substrate processing system | Karthik Adappa Sathish, Mitali Mrigendra Basargi, Ravi Kumar | 2025-05-06 |
| 9852901 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall +2 more | 2017-12-26 |
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall +2 more | 2016-10-04 |
| 9449795 | Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor | Mohamed Sabri, Edward Augustyniak, Douglas Keil, Ramkishan Rao Lingampalli, Karl Leeser | 2016-09-20 |