Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832931 | Electrostatic chuck with embossed top plate and cooling channels | Arumuga Balan, Jeonghoon Oh | 2020-11-10 |
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Rongping Wang, Ruizhe Ren, Jon C. Farr, Peter DEMONTE, Parthiban Balakrishna | 2019-02-19 |