Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Rongping Wang, Ruizhe Ren, Jon C. Farr, Chethan Mangalore, Peter DEMONTE | 2019-02-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Rongping Wang, Ruizhe Ren, Jon C. Farr, Chethan Mangalore, Peter DEMONTE | 2019-02-19 |