Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12504269 | Self-aligning interferometric end point housing | Trishul BYREGOWDA SHIVALINGAIAH, Skanda Simha Chandrashekar, Karthik Prabhakar, Mahadev Joshi | 2025-12-23 | |
| 10704146 | Support assembly for substrate backside discoloration control | Shinichi Oki, Yuji Aoki, Yoshinobu Mori | 2020-07-07 | $29,619,000 |
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Rongping Wang, Ruizhe Ren, Jon C. Farr, Chethan Mangalore, Parthiban Balakrishna | 2019-02-19 | $29,015,000 |