Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704146 | Support assembly for substrate backside discoloration control | Shinichi Oki, Yuji Aoki, Yoshinobu Mori | 2020-07-07 |
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Rongping Wang, Ruizhe Ren, Jon C. Farr, Chethan Mangalore, Parthiban Balakrishna | 2019-02-19 |