| 12165899 |
Bipolar electrostatic chuck for etch chamber |
Yuji Aoki, Trishul BYREGOWDA SHIVALINGAIAH |
2024-12-10 |
| 11441236 |
Chamber components for epitaxial growth apparatus |
Yoshinobu Mori |
2022-09-13 |
| 11032945 |
Heat shield assembly for an epitaxy chamber |
Yoshinobu Mori |
2021-06-08 |
| 10978324 |
Upper cone for epitaxy chamber |
Yoshinobu Mori, Yuji Aoki |
2021-04-13 |
| 10704146 |
Support assembly for substrate backside discoloration control |
Yuji Aoki, Peter DEMONTE, Yoshinobu Mori |
2020-07-07 |
| 10544518 |
Chamber components for epitaxial growth apparatus |
Yoshinobu Mori |
2020-01-28 |
| 10446420 |
Upper cone for epitaxy chamber |
Yoshinobu Mori, Yuji Aoki |
2019-10-15 |
| 9879358 |
Heat shield ring for high growth rate EPI chamber |
Yuji Aoki, Yoshinobu Mori |
2018-01-30 |
| 9680053 |
Nitride semiconductor device |
Masayuki Kuroda, Manabu Yanagihara |
2017-06-13 |
| 6781400 |
Method of testing semiconductor integrated circuits and testing board for use therein |
Yoshiro Nakata |
2004-08-24 |
| 6518779 |
Probe card |
Yoshiro Nakata, Masaaki Ishizaka |
2003-02-11 |
| 6400175 |
Method of testing semiconductor integrated circuits and testing board for use therein |
Yoshiro Nakata |
2002-06-04 |
| 6297658 |
Wafer burn-in cassette and method of manufacturing probe card for use therein |
Yoshiro Nakata |
2001-10-02 |
| 6229329 |
Method of testing electrical characteristics of multiple semiconductor integrated circuits simultaneously |
Yoshiro Nakata |
2001-05-08 |
| 5829126 |
Method of manufacturing probe card |
Koichi Nagao, Yoshiro Nakata |
1998-11-03 |
| 5665610 |
Semiconductor device checking method |
Yoshiro Nakata, Koichi Nagao, Kenzo Hatada, Shigeoki Mori, Takashi Sato +1 more |
1997-09-09 |
| 5605844 |
Inspecting method for semiconductor devices |
Koichi Nagao, Yoshiro Nakata |
1997-02-25 |
| 4972489 |
Sound reproducing apparatus |
Toshihiko Ohashi, Fumiyasu Konno, Hiroshi Yagi, Takahiro Nakauma |
1990-11-20 |
