Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165899 | Bipolar electrostatic chuck for etch chamber | Yuji Aoki, Trishul BYREGOWDA SHIVALINGAIAH | 2024-12-10 |
| 11441236 | Chamber components for epitaxial growth apparatus | Yoshinobu Mori | 2022-09-13 |
| 11032945 | Heat shield assembly for an epitaxy chamber | Yoshinobu Mori | 2021-06-08 |
| 10978324 | Upper cone for epitaxy chamber | Yoshinobu Mori, Yuji Aoki | 2021-04-13 |
| 10704146 | Support assembly for substrate backside discoloration control | Yuji Aoki, Peter DEMONTE, Yoshinobu Mori | 2020-07-07 |
| 10544518 | Chamber components for epitaxial growth apparatus | Yoshinobu Mori | 2020-01-28 |
| 10446420 | Upper cone for epitaxy chamber | Yoshinobu Mori, Yuji Aoki | 2019-10-15 |
| 9879358 | Heat shield ring for high growth rate EPI chamber | Yuji Aoki, Yoshinobu Mori | 2018-01-30 |
| 9680053 | Nitride semiconductor device | Masayuki Kuroda, Manabu Yanagihara | 2017-06-13 |
| 6781400 | Method of testing semiconductor integrated circuits and testing board for use therein | Yoshiro Nakata | 2004-08-24 |
| 6518779 | Probe card | Yoshiro Nakata, Masaaki Ishizaka | 2003-02-11 |
| 6400175 | Method of testing semiconductor integrated circuits and testing board for use therein | Yoshiro Nakata | 2002-06-04 |
| 6297658 | Wafer burn-in cassette and method of manufacturing probe card for use therein | Yoshiro Nakata | 2001-10-02 |
| 6229329 | Method of testing electrical characteristics of multiple semiconductor integrated circuits simultaneously | Yoshiro Nakata | 2001-05-08 |
| 5829126 | Method of manufacturing probe card | Koichi Nagao, Yoshiro Nakata | 1998-11-03 |
| 5665610 | Semiconductor device checking method | Yoshiro Nakata, Koichi Nagao, Kenzo Hatada, Shigeoki Mori, Takashi Sato +1 more | 1997-09-09 |
| 5605844 | Inspecting method for semiconductor devices | Koichi Nagao, Yoshiro Nakata | 1997-02-25 |
| 4972489 | Sound reproducing apparatus | Toshihiko Ohashi, Fumiyasu Konno, Hiroshi Yagi, Takahiro Nakauma | 1990-11-20 |