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Alternating phase shift mask inspection using biased inspection data |
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Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes) |
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Method of making a packaged radiation sensitive resist film-coated workpiece |
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Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks |
— |
2006-01-24 |
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Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks |
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2004-11-02 |
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Packaged radiation sensitive coated workpiece process for making and method of storing same |
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2003-04-08 |
