Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308265 | RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system | Siyuan Tian, Yuma Ohkura, Matthew CLAUSSEN | 2025-05-20 |
| 12165891 | Identification of and compensation for a failure in a heater array | — | 2024-12-10 |
| 12142464 | In situ real-time sensing and compensation of non-uniformities in substrate processing systems | Benny Wu, Oleksandr MIKHNENKO, Slobodan Mitrovic | 2024-11-12 |
| 11901944 | Power and data transmission to substrate support in plasma chambers via optical fiber | Fred Dennis Egley | 2024-02-13 |
| 11823875 | Real-time control of temperature in a plasma chamber | — | 2023-11-21 |
| 11087962 | Real-time control of temperature in a plasma chamber | — | 2021-08-10 |
| 10306776 | Substrate processing system printed-circuit control board assembly with one or more heater layers | Eric A. Pape, Fred Dennis Egley | 2019-05-28 |