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Symmetric and irregular shaped plasmas using modular microwave sources |
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Phased array modular high-frequency source |
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| 11081317 |
Modular high-frequency source |
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2021-08-03 |
| 10720311 |
Phased array modular high-frequency source |
Philip Allan Kraus, Thai Cheng Chua, Dmitry A. Dzilno |
2020-07-21 |
| 10714372 |
System for coupling a voltage to portions of a substrate |
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| 10707058 |
Symmetric and irregular shaped plasmas using modular microwave sources |
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2020-07-07 |
| 10504699 |
Phased array modular high-frequency source |
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2019-12-10 |
