Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10167443 | Wet clean process for removing CxHyFz etch residue | Robert L. Bruce, Sebastian U. Engelmann, Eric A. Joseph, Mahmoud Khojasteh, Masahiro Nakamura +3 more | 2019-01-01 |
| 9711365 | Etch rate enhancement for a silicon etch process through etch chamber pretreatment | Eric A. Joseph, Goh Matsuura, Masahiro Nakamura, Edmund M. Sikorski | 2017-07-18 |
| 9536731 | Wet clean process for removing CxHyFz etch residue | Robert L. Bruce, Sebastian U. Engelmann, Eric A. Joseph, Mahmoud Khojasteh, Masahiro Nakamura +3 more | 2017-01-03 |
| 9171796 | Sidewall image transfer for heavy metal patterning in integrated circuits | Markus Brink, Michael A. Guillorn, Mark Hoinkis, Eric A. Joseph, Hiroyuki Miyazoe | 2015-10-27 |