Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711365 | Etch rate enhancement for a silicon etch process through etch chamber pretreatment | Eric A. Joseph, Masahiro Nakamura, Edmund M. Sikorski, Bang N. To | 2017-07-18 |
| 8928124 | High aspect ratio and reduced undercut trench etch process for a semiconductor substrate | Nicholas C. M. Fuller, Eric A. Joseph, Edmund M. Sikorski | 2015-01-06 |
| 8652969 | High aspect ratio and reduced undercut trench etch process for a semiconductor substrate | Nicholas C. M. Fuller, Eric A. Joseph, Edmund M. Sikorski | 2014-02-18 |