Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513566 | Lithographic apparatus | Kursat Bal, Bernardus Antonius Johannes Luttikhuis, David Christopher Ockwell, Han-Kwang Nienhuys, Maikel Bernardus Theodorus Leenders | 2016-12-06 |
| 8421993 | Fluid handling structure, lithographic apparatus and device manufacturing method | Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens +1 more | 2013-04-16 |
| 8351018 | Fluid handling structure, lithographic apparatus and device manufacturing method | Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen, Koen Steffens | 2013-01-08 |
| 8345218 | Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method | Michel Riepen, Nicolaas Rudolf Kemper, Johannes Petrus Martinus Bernardus Vermeulen, Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips | 2013-01-01 |