Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334315 | Cooled substrate support assembly for radio frequency environments | Vijay D. Parkhe, Andreas Schmid, Stephen Prouty, Alvaro Garcia de Gorordo, Martin Perez-Guzman | 2025-06-17 |
| 11764041 | Adjustable thermal break in a substrate support | Alvaro Garcia de Gorordo, Daniel Sang Byun, Andreas Schmid, Stephen Prouty | 2023-09-19 |
| 11646183 | Substrate support assembly with arc resistant coolant conduit | Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid | 2023-05-09 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid, Stephen Prouty | 2023-01-31 |
| 11437261 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid | 2022-09-06 |
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid | 2022-06-28 |