Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, John R. Torczynski, Rudy F. Garcia, Leonard E. Klebanoff, Gildardo Delgado +2 more | 2016-07-12 |
| 9244368 | Particle control near reticle and optics using showerhead | Gildardo Delgado, Frank Chilese, Rudy F. Garcia, John R. Torczynski, Daniel J. Rader +2 more | 2016-01-26 |
| 6110844 | Reduction of particle deposition on substrates using temperature gradient control | Daniel J. Rader, Ronald C. Dykhuizen | 2000-08-29 |
| 5777245 | Particle dispersing system and method for testing semiconductor manufacturing equipment | Madhavi R. Chandrachood, Steve Ghanayem, Nancy Cantwell, Daniel J. Rader | 1998-07-07 |
| 5522933 | Particle-free microchip processing | Daniel J. Rader | 1996-06-04 |