Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300889 | Metrology apparatus | Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Subodh Singh, Ilya MALAKHOVSKY, Ronald Henricus Johannes OTTEN | 2022-04-12 |
| 10534274 | Method of inspecting a substrate, metrology apparatus, and lithographic system | Teunis Willem Tukker, Gerbrand Van Der Zouw | 2020-01-14 |
| 10437159 | Measurement system, lithographic system, and method of measuring a target | Teunis Willem Tukker, Gerbrand Van Der Zouw | 2019-10-08 |
| 9921489 | Focus monitoring arrangement and inspection apparatus including such an arrangement | Henricus Petrus Maria Pellemans | 2018-03-20 |
| 9786044 | Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method | Andreas Fuchs, Peter Hanzen Wardenier, Maxime D'Alfonso, Hilko Dirk Bos | 2017-10-10 |
| 9753379 | Inspection apparatus and methods, methods of manufacturing devices | Henricus Petrus Maria Pellemans, Patrick Warnaar | 2017-09-05 |