Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Martin Jay Seamons, Michael P. Nault, Thomas Nowak +2 more | 2005-01-18 |
| 6413321 | Method and apparatus for reducing particle contamination on wafer backside during CVD process | Bok Hoen Kim, Mario D. Silvetti, Davood Khalili, Martin Jay Seamons, Emanuele Cappello +2 more | 2002-07-02 |
| 6309452 | Wet rub resistant ink compositions | Bradley Beach, Anna Marie Pearson, Ajay Kanubhai Suthar | 2001-10-30 |