Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043899 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Mark Hawkins, Loren Jacobs | 2024-07-23 |
| 12040217 | Substrate lift mechanism and reactor including same | John DiSanto | 2024-07-16 |
| 11587821 | Substrate lift mechanism and reactor including same | John DiSanto | 2023-02-21 |
| 11390950 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Mark Hawkins, Loren Jacobs | 2022-07-19 |
| 11264255 | Pre-clean chamber and process with substrate tray for changing substrate temperature | John Tolle | 2022-03-01 |
| 11053585 | Reactor system for sublimation of pre-clean byproducts and method thereof | John Tolle | 2021-07-06 |
| 11015245 | Gas-phase reactor and system having exhaust plenum and components thereof | Shawn George Thomas | 2021-05-25 |
| 11018047 | Hybrid lift pin | Uday Kiran Rokkam | 2021-05-25 |
| 10787741 | Method and system for in situ formation of gas-phase compounds | John Tolle, Jereld Lee Winkler | 2020-09-29 |
| 10770336 | Substrate lift mechanism and reactor including same | John DiSanto | 2020-09-08 |
| 10519541 | Reactor system for sublimation of pre-clean byproducts and method thereof | John Tolle | 2019-12-31 |
| 10373850 | Pre-clean chamber and process with substrate tray for changing substrate temperature | John Tolle | 2019-08-06 |
| 10053774 | Reactor system for sublimation of pre-clean byproducts and method thereof | John Tolle | 2018-08-21 |
| 9890456 | Method and system for in situ formation of gas-phase compounds | John Tolle, Jereld Lee Winkler | 2018-02-13 |
| D793352 | Getter plate | — | 2017-08-01 |
| 9514927 | Plasma pre-clean module and process | John Tolle, Matthew G. Goodman, Robert Vyne | 2016-12-06 |
| 9299557 | Plasma pre-clean module and process | John Tolle, Matthew G. Goodman, Robert Vyne | 2016-03-29 |
| 9169975 | Systems and methods for mass flow controller verification | Michael Sarin, Rafael Mendez, Gregory Bartlett, Keith R. Lawson, Andy Rosser | 2015-10-27 |
| 8927435 | Load lock having secondary isolation chamber | Ravinder Aggarwal, Jeroen Stoutjesdijk, Loring G. Davis, John DiSanto | 2015-01-06 |
| 8440048 | Load lock having secondary isolation chamber | Ravinder Aggarwal, Jeroen Stoutjesdijk, Loring G. Davis, John DiSanto | 2013-05-14 |
| 8047706 | Calibration of temperature control system for semiconductor processing chamber | Matthew G. Goodman, Mark Hawkins, Ravinder Aggarwal, Michael Eugene Givens, Gregory Bartlett | 2011-11-01 |