Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6686996 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2004-02-03 |
| 6414752 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2002-07-02 |
| 5416594 | Surface scanner with thin film gauge | Kenneth P. Gross, George Kren | 1995-05-16 |
| 5241366 | Thin film thickness monitor | Armand P. Neukermans, Stanley Stokowski, Ralph C. Wolf, Matthew B. Lutzker | 1993-08-31 |