Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7709866 | Method for forming semiconductor contacts | Nadia M. Rahhal-Orabi, Charles H. Wallace, Alison Davis | 2010-05-04 |
| 7632610 | Sub-resolution assist features | Charles H. Wallace, Paul A. Nyhus | 2009-12-15 |
| 7358111 | Imageable bottom anti-reflective coating for high resolution lithography | — | 2008-04-15 |
| 7312155 | Forming self-aligned nano-electrodes | Valery M. Dubin, Andrew Berlin, Mark Bohr | 2007-12-25 |
| 7288344 | Accommodating diffraction in the printing of features on a substrate | Rex Frost | 2007-10-30 |
| 7265431 | Imageable bottom anti-reflective coating for high resolution lithography | — | 2007-09-04 |
| 7258965 | Pre-exposure of patterned photoresist films to achieve critical dimension reduction during temperature reflow | Rex Frost | 2007-08-21 |
| 6977219 | Solvent vapor-assisted plasticization of photoresist films to achieve critical dimension reduction during temperature reflow | Rex Frost | 2005-12-20 |
| 6968532 | Multiple exposure technique to pattern tight contact geometries | Rex Frost, Phi L. Nguyen | 2005-11-22 |
| 6927082 | Method of evaluating the quality of a contact plug fill | Oleg Golonzka, Timothy F. Crimmins | 2005-08-09 |
| 5933759 | Method of controlling etch bias with a fixed lithography pattern for sub-micron critical dimension shallow trench applications | Phi L. Nguyen, Ralph A. Schweinfurth | 1999-08-03 |