Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7018784 | Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarity | Jörg Rottstegge, Waltraud Herbst, Eberhard Kuhn | 2006-03-28 |
| 6946236 | Negative resist process with simultaneous development and aromatization of resist structures | Jörg Rottstegge, Eberhard Kuhn, Christian Eschbaumer, Michael Sebald | 2005-09-20 |
| 6899997 | Process for modifying resist structures and resist films from the aqueous phase | Siew Siew Yip, Jörg Rottstegge, Ernst-Christian Richter, Michael Sebald, Kerstin Seibold +1 more | 2005-05-31 |
| 6893972 | Process for sidewall amplification of resist structures and for the production of structures having reduced structure size | Jörg Rottstegge, Eberhard Kuhn, Waltraud Herbst, Christian Eschbaumer, Christoph Hohle +1 more | 2005-05-17 |
| 6841332 | Photoresist compound and method for structuring a photoresist layer | Eberhard Kuehn, Ernst-Christian Richter, Michael Sebald | 2005-01-11 |
| 6770423 | Negative resist process with simultaneous development and silylation | Jörg Rottstegge, Eberhard Kuhn, Waltraud Herbst, Christian Eschbaumer, Christoph Hohle +1 more | 2004-08-03 |
| 6042993 | Photolithographic structure generation process | Rainer Leuschner, Ewald Karl Michael Günther, Albert Hammerschmidt | 2000-03-28 |
| 4551609 | Spectrometry plasma burner | — | 1985-11-05 |