Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7078709 | Apparatus and method for proof of outgassing products | Karl Kragler, Michael Sebald | 2006-07-18 |
| 7052820 | Silicon-containing resist for photolithography | Jörg Rottstegge, Eberhard Kuhn, Christian Eschbaumer, Christoph Hohle, Michael Sebald | 2006-05-30 |
| 7033740 | Photoresists with reaction anchors for chemical consolidation of resist structures for exposures at 157 nm | Jörg Rottstegge, Christian Eschbaumer, Christoph Hohle | 2006-04-25 |
| 7018784 | Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarity | Jörg Rottstegge, Gertrud Falk, Eberhard Kuhn | 2006-03-28 |
| 6893972 | Process for sidewall amplification of resist structures and for the production of structures having reduced structure size | Jörg Rottstegge, Eberhard Kuhn, Christian Eschbaumer, Christoph Hohle, Gertrud Falk +1 more | 2005-05-17 |
| 6770423 | Negative resist process with simultaneous development and silylation | Jörg Rottstegge, Eberhard Kuhn, Christian Eschbaumer, Christoph Hohle, Gertrud Falk +1 more | 2004-08-03 |
| 6759184 | Amplification of resist structures of fluorinated resist polymers by structural growth of the structures by targeted chemical bonding of fluorinated oligomers | Jörg Rottstegge, Christian Eschbaumer, Christoph Hohle, Michael Sebald | 2004-07-06 |
| 6582888 | Method for producing organic electroluminescent components | Rainer Leuschner, Ewald Karl Michael Günther, Jurgen Simmerer | 2003-06-24 |