Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7407554 | Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent | Matthew E. Colburn, Dmitriy Shneyder | 2008-08-05 |
| 6864180 | Method for reworking low-k polymers used in semiconductor structures | Darryl D. Restaino, Delores Bennett, John A. Fitzsimmons, John Fritche, Jeffrey Hedrick +2 more | 2005-03-08 |
| 6806182 | Method for eliminating via resistance shift in organic ILD | Darryl D. Restaino, Erdem Kaltalioglu, Delores Bennett, Chih-Chih Liu, Hsueh-Chung Chen +3 more | 2004-10-19 |
| 6638878 | Film planarization for low-k polymers used in semiconductor structures | Darryl D. Restaino, Jeffrey Hedrick, John A. Fitzsimmons, Christy S. Tyberg, Chih-Chien Liu | 2003-10-28 |