Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318574 | Method and structure for enabling high aspect ratio sacrificial gates | Kangguo Cheng, Fee Li Lie, Jeffrey C. Shearer, John R. Sporre, Sean Teehan | 2016-04-19 |
| 9214360 | Methods of patterning features having differing widths | Linus Jang, Soon-Cheon Seo | 2015-12-15 |
| 9184042 | Wafer backside particle mitigation | Marc A. Bergendahl, James J. Demarest, Alex Richard Hubbard, Richard C. Johnson, James J. Kelly +3 more | 2015-11-10 |
| 8735296 | Method of simultaneously forming multiple structures having different critical dimensions using sidewall transfer | Sivananda K. Kanakasabapathy | 2014-05-27 |
| 8716133 | Three photomask sidewall image transfer method | Shyng-Tsong Chen, Neal V. Lafferty, Yunpeng Yin | 2014-05-06 |
| 8673165 | Sidewall image transfer process with multiple critical dimensions | Sudharshanan Raghunathan, Sivananda K. Kanakasabapathy, Allen H. Gabor, Sean D. Burns, Erin Catherine McLellan | 2014-03-18 |
| 8637406 | Image transfer process employing a hard mask layer | Sivananda K. Kanakasabapathy, Yunpeng Yin | 2014-01-28 |