Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479884 | Interim oxidation of silsesquioxane dielectric for dual damascene process | Stephen E. Greco, John P. Hummel, Joyce C. Liu, Vincent J. McGahay, Rebecca D. Mih +1 more | 2002-11-12 |
| 6348736 | In situ formation of protective layer on silsesquioxane dielectric for dual damascene process | Vincent J. McGahay, John P. Hummel, Joyce C. Liu, Rebecca D. Mih, Kamalesh K. Srivastava +1 more | 2002-02-19 |
| 6329280 | Interim oxidation of silsesquioxane dielectric for dual damascene process | Stephen E. Greco, John P. Hummel, Joyce C. Liu, Vincent J. McGahay, Rebecca D. Mih +1 more | 2001-12-11 |
| 6177360 | Process for manufacture of integrated circuit device | Kenneth Raymond Carter, Martha Alyne Harbison, Craig J. Hawker, James L. Hedrick, Victor Yee-Way Lee +4 more | 2001-01-23 |
| 6174814 | Method for producing a crack stop for interlevel dielectric layers | Eduardo Garcia, Nancy Anne Greco, Stephen E. Greco, Ernest N. Levine | 2001-01-16 |
| 6091131 | Integrated circuit having crack stop for interlevel dielectric layers | Eduardo Garcia, Nancy Anne Greco, Stephen E. Greco, Ernest N. Levine | 2000-07-18 |