Issued Patents All Time
Showing 151–172 of 172 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268432 | Interconnect structures with engineered dielectrics with nanocolumnar porosity | Satya V. Nitta, Sampath Purushothaman, Charles T. Black, Kathryn Guarini | 2007-09-11 |
| 7229273 | Imprint lithography template having a feature size under 250 nm | Todd C. Bailey, Byung-Jin Choi, Sidlgata V. Sreenivasan, Carlton G. Willson, John Ekerdt | 2007-06-12 |
| 7186483 | Method of determining alignment of a template and a substrate having a liquid disposed therebetween | Sidlgata V. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2007-03-06 |
| 7179758 | Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics | Nirupama Chakrapani, Christos D. Dimitrakopoulos, Dirk Pfeiffer, Sampath Purushothaman, Satyanarayana V. Nitta | 2007-02-20 |
| 7084479 | Line level air gaps | Shyng-Tsong Chen, Stefanie Chiras, Timothy J. Dalton, Jeffrey Hedrick, Elbert E. Huang +9 more | 2006-08-01 |
| 7071097 | Method for improved process latitude by elongated via integration | — | 2006-07-04 |
| 7060324 | Method of creating a dispersion of a liquid on a substrate | Todd C. Bailey, Byung-Jin Choi, Sidlgata V. Sreenivasan, C. Grant Willson, John Ekerdt | 2006-06-13 |
| 7037744 | Method for fabricating a self-aligned nanocolumnar airbridge and structure produced thereby | Satyanarayana V. Nitta, Sampath Purushothaman | 2006-05-02 |
| 7030495 | Method for fabricating a self-aligned nanocolumnar airbridge and structure produced thereby | Satyanarayana V. Nitta, Sampath Purushothaman | 2006-04-18 |
| 6986975 | Method of aligning a template with a substrate employing moire patterns | Sidlgata V. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2006-01-17 |
| 6954275 | Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography | Byung-Jin Choi, S. Sreenivasan, C. Grant Willson, Todd C. Bailey, John Ekerdt | 2005-10-11 |
| 6930034 | Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence | Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman, Katherine L. Saenger | 2005-08-16 |
| 6921615 | High-resolution overlay alignment methods for imprint lithography | Sidlgata V. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2005-07-26 |
| 6919152 | High resolution overlay alignment systems for imprint lithography | S. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2005-07-19 |
| 6916585 | Method of varying template dimensions to achieve alignment during imprint lithography | Sidlgata V. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2005-07-12 |
| 6911400 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2005-06-28 |
| 6902853 | Dual wavelength method of determining a relative position of a substrate and a template | Sidlgata V. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2005-06-07 |
| 6842229 | Imprint lithography template comprising alignment marks | Sidlgata V. Sreenivasan, Byung-Jin Choi, Todd C. Bailey | 2005-01-11 |
| 6719915 | Step and flash imprint lithography | Carlton G. Willson | 2004-04-13 |
| 6696220 | Template for room temperature, low pressure micro-and nano-imprint lithography | Todd C. Bailey, Byung-Jin Choi, S. Sreenivasan, C. Grant Willson, John Ekerdt | 2004-02-24 |
| 6641899 | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same | Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2003-11-04 |
| 6334960 | Step and flash imprint lithography | Carlton G. Willson | 2002-01-01 |