Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653048 | High silicon content monomers and polymers suitable for 193 nm bilayer resists | Phillip Brock, Richard Anthony DiPietro, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2003-11-25 |
| RE38282 | Process for using bilayer photoresist | Robert David Allen, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2003-10-21 |
| 6482566 | Hydroxycarborane photoresists and process for using same in bilayer thin film imaging lithography | Scott A. MacDonald, Arpan Mahorowala, Robert D. Miller, Josef Michl, Gregory Michael Wallraff | 2002-11-19 |
| 6444408 | High silicon content monomers and polymers suitable for 193 nm bilayer resists | Phillip Brock, Richard Anthony DiPietro, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2002-09-03 |
| 6277546 | Process for imaging of photoresist | Gregory Breyta, Nicholas J. Clecak, William D. Hinsberg, Hiroshi Ito, Scott A. MacDonald +1 more | 2001-08-21 |
| 6165673 | Resist composition with radiation sensitive acid generator | Gregory Breyta, Richard Anthony DiPietro, Hiroshi Ito, Robert David Allen, Juliann Opitz +1 more | 2000-12-26 |
| 5985524 | Process for using bilayer photoresist | Robert David Allen, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 1999-11-16 |
| 5776990 | Foamed polymer for use as dielectric material | James L. Hedrick, Jeffrey W. Labadie, Robert Bruce Prime, Thomas P. Russell | 1998-07-07 |
| 5585220 | Resist composition with radiation sensitive acid generator | Gregory Breyta, Richard Anthony DiPietro, Hiroshi Ito | 1996-12-17 |
| RE34524 | Polyimide coating compositions based on meta-dialkyldihydrogen pyromellitate and aromatic diamines | Richard D. Diller, deceased, Anthony F. Arnold, Ying-Ying Cheng, Patricia Metzger Cotts, Mahmoud Khojasteh +3 more | 1994-01-25 |
| 5045608 | Polyimide-poly(phenylquinoxaline) block copolymers | James L. Hedrick, Jeffrey W. Labadie, Sally A. Swanson, Willi Volksen | 1991-09-03 |
| 4849501 | Polyimide coating compositions based on meta-dialkyldihydrogen pyromellitate and aromatic diamines | Richard D. Diller, deceased, Anthony F. Arnold, Ying-Ying Cheng, Patricia Metzger Cotts, Mahmoud Khojasteh +3 more | 1989-07-18 |
| 4612210 | Process for planarizing a substrate | Debra Brouse LaVergne, Robert J. Twieg, Willi Volksen | 1986-09-16 |
| 4464460 | Process for making an imaged oxygen-reactive ion etch barrier | Hiroyuki Hiraoka, Robert D. Miller, Lester A. Pederson, Carlton G. Willson | 1984-08-07 |
| 4291272 | Method for reducing homonuclear broadening in magnetic resonance spectra of solids | Raymond D. Kendrick, Costantino S. Yannoni | 1981-09-22 |