Issued Patents All Time
Showing 26–50 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9969613 | Method for forming micro-electro-mechanical system (MEMS) beam structure | Michael T. Brigham, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more | 2018-05-15 |
| 9938137 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more | 2018-04-10 |
| 9932222 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more | 2018-04-03 |
| 9932225 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2018-04-03 |
| 9926191 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2018-03-27 |
| 9915784 | Optical waveguide structure with waveguide coupler to facilitate off-chip coupling | Russell A. Budd, Fuad E. Doany, Benjamin G. Lee, Laurent Schares | 2018-03-13 |
| 9828243 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2017-11-28 |
| 9637373 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2017-05-02 |
| 9624099 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2017-04-18 |
| 9604839 | Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures | Anthony K. Stamper | 2017-03-28 |
| 9593007 | Method of forming a micro-electro-mechanical system (MEMS) structure | Anthony K. Stamper | 2017-03-14 |
| 9580298 | Micro-electro-mechanical system (MEMS) structures and design structures | Anthony K. Stamper | 2017-02-28 |
| 9406472 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Dinh Dang, Thai Doan, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin +5 more | 2016-08-02 |
| 9352954 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2016-05-31 |
| 9245824 | Through-vias for wiring layers of semiconductor devices | Xiao Hu Liu, Bucknell C. Webb | 2016-01-26 |
| 9233831 | Micro-electro-mechanical system (MEMS) structures and design structures | Anthony K. Stamper | 2016-01-12 |
| 9236325 | Through-vias for wiring layers of semicondutor devices | Xiao Hu Liu, Bucknell C. Webb | 2016-01-12 |
| 9120667 | Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures | Anthony K. Stamper | 2015-09-01 |
| 9103972 | Optical waveguide structure with waveguide coupler to facilitate off-chip coupling | Russell A. Budd, Fuad E. Doany, Benjamin G. Lee, Laurent Schares | 2015-08-11 |
| 9059135 | Nanochannel process and structure for bio-detection | Jingwei Bai, Evan G. Colgan, Stanislav Polonsky | 2015-06-16 |
| 8987031 | Fabricating a small-scale radiation detector | Michael S. Gordon, Eric A. Joseph, Hiroyuki Miyazoe, Kenneth P. Rodbell, Arun Sharma +1 more | 2015-03-24 |
| 8973250 | Methods of manufacturing a micro-electro-mechanical system (MEMS) structure | Anthony K. Stamper | 2015-03-10 |
| 8956903 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Anthony K. Stamper, Eric J. White | 2015-02-17 |
| 8940570 | Micro-electro-mechanical system (MEMS) structures and design structures | Anthony K. Stamper | 2015-01-27 |
| 8901621 | Nanochannel process and structure for bio-detection | Jingwei Bai, Evan G. Colgan, Stanislav Polonsky | 2014-12-02 |