Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7742632 | Alternating phase shift mask inspection using biased inspection data | Karen D. Badger, Michael S. Hibbs | 2010-06-22 |
| 7619730 | Mask inspection DNIR replacement based on location of tri-tone level database images—2P shapes | Karen D. Badger, David L. Katcoff, Jeffrey P. Lissor | 2009-11-17 |
| 7494748 | Method for correction of defects in lithography masks | James W. Adkisson, Eric M. Coker, Jed H. Rankin, Anthony K. Stamper | 2009-02-24 |
| 7443497 | Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes) | Karen D. Badger, David L. Katcoff, Jeffrey P. Lissor | 2008-10-28 |
| 7168224 | Method of making a packaged radiation sensitive resist film-coated workpiece | Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros, Wayne M. Moreau +2 more | 2007-01-30 |
| 6989219 | Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks | — | 2006-01-24 |
| 6811959 | Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks | — | 2004-11-02 |
| 6543617 | Packaged radiation sensitive coated workpiece process for making and method of storing same | Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros, Wayne M. Moreau +2 more | 2003-04-08 |