Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672611 | Hardmask stress, grain, and structure engineering for advanced memory applications | Michael Rizzolo, Oscar van der Straten, Chih-Chao Yang | 2020-06-02 |
| 10672618 | Systems and methods for patterning features in tantalum nitride (TaN) layer | Vinh Luong, Isabel Cristina Chu | 2020-06-02 |
| 10656527 | Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer | Ekmini Anuja De Silva, Indira Seshadri, Jing Guo, Nelson Felix | 2020-05-19 |
| 10615037 | Tone reversal during EUV pattern transfer using surface active layer assisted selective deposition | Ekmini Anuja De Silva, Luciana Meli Thompson | 2020-04-07 |
| 10539884 | Post-lithography defect inspection using an e-beam inspection tool | Luciana Meli Thompson, Ekmini Anuja De Silva | 2020-01-21 |
| 9984977 | Semiconductor constructions | Mohd Kamran Akhtar, Shane J. Trapp | 2018-05-29 |
| 9679852 | Semiconductor constructions | Mohd Kamran Akhtar, Shane J. Trapp | 2017-06-13 |