Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935931 | Selective shrink for contact trench | Ruilong Xie, Jing Guo, Ekmini Anuja De Silva | 2024-03-19 |
| 11543751 | Organic photoresist adhesion to metal oxide hardmasks | Jennifer Church, Nelson Felix, Ekmini Anuja De Silva | 2023-01-03 |
| 11373880 | Creating different width lines and spaces in a metal layer | Christopher J. Penny, Ekmini Anuja De Silva, Ashim Dutta | 2022-06-28 |
| 10975464 | Hard mask films with graded vertical concentration formed using reactive sputtering in a radio frequency deposition chamber | Ekmini Anuja De Silva, Yongan Xu, Chih-Chao Yang | 2021-04-13 |
| 10950440 | Patterning directly on an amorphous silicon hardmask | Ekmini Anuja De Silva, Nelson Felix | 2021-03-16 |
| 10755926 | Patterning directly on an amorphous silicon hardmask | Ekmini Anuja De Silva, Nelson Felix | 2020-08-25 |
| 10366879 | Dry and wet etch resistance for atomic layer deposited TiO2 for SIT spacer application | Cornelius Brown Peethala, Ekmini Anuja De Silva | 2019-07-30 |
| 10249512 | Tunable TiOxNy hardmask for multilayer patterning | Ekmini Anuja De Silva, Nelson Felix, Sivananda K. Kanakasabapathy | 2019-04-02 |
| 9941142 | Tunable TiOxNy hardmask for multilayer patterning | Ekmini Anuja De Silva, Nelson Felix, Sivananda K. Kanakasabapathy | 2018-04-10 |
| 9799534 | Application of titanium-oxide as a patterning hardmask | Ekmini Anuja De Silva, Nelson Felix, Sivananda K. Kanakasabapathy, Indira Seshadri | 2017-10-24 |