Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamato, Shoji Ikuhara +1 more | 2003-09-09 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2003-07-08 |
| 6186153 | Plasma treatment method and manufacturing method of semiconductor device | Nobuo Tsumaki, Shigeru Kakuta, Kazuo Nojiri, Kazue Takahashi | 2001-02-13 |
| 5258047 | Holder device and semiconductor producing apparatus having same | Hiromitsu Tokisue, Nobuo Tsumaki, Hiroshi Inouye | 1993-11-02 |
| 4708350 | Magnetic liquid seal with magnetized deformable magnet | Muneo Mizumoto, Hiroshi Inouye | 1987-11-24 |