Issued Patents All Time
Showing 76–80 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7664608 | Defect inspection method and apparatus | Akira Hamamatsu, Shunji Maeda, Kaoru Sakai | 2010-02-16 |
| 7528942 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Sachio Uto, Akira Hamamatsu, Shunji Maeda | 2009-05-05 |
| 7492452 | Defect inspection method and system | Sachio Uto, Hiroyuki Nakano, Yukihiro Shibata, Akira Hamamatsu | 2009-02-17 |
| 7465935 | Method for inspecting pattern defect and device for realizing the same | Hiroyuki Nakano, Shunji Maeda, Sachio Uto | 2008-12-16 |
| 7333192 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama +1 more | 2008-02-19 |