Issued Patents All Time
Showing 76–88 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831451 | Method for adjusting a Weibull slope for variations in temperature and bias voltage | Hyeon-Seag Kim | 2004-12-14 |
| 6829040 | Lithography contrast enhancement technique by varying focus with wavelength modulation | Ivan Lalovic, Christopher F. Lyons, Ramkumar Subramanian | 2004-12-07 |
| 6784992 | Polarization measurement device and method | Alden Acheta | 2004-08-31 |
| 6710853 | Phase grating focus monitor using overlay technique | Bruno La Fontaine, Harry J. Levinson | 2004-03-23 |
| 6696847 | Photo assisted electrical linewidth measurement method and apparatus | Bruno M. LaFontaine, Harry J. Levinson | 2004-02-24 |
| 6646326 | Method and system for providing source/drain-gate spatial overlap engineering for low-power devices | Hyeon-Seag Kim | 2003-11-11 |
| 6602794 | Silylation process for forming contacts | — | 2003-08-05 |
| 6555274 | Pupil filtering for a lithographic tool | Bruno La Fontaine | 2003-04-29 |
| 6556286 | Inspection system for the pupil of a lithographic tool | Bruno La Fontaine, Harry J. Levinson | 2003-04-29 |
| 6535280 | Phase-shift-moiré focus monitor | Bruno La Fontaine, Harry J. Levinson | 2003-03-18 |
| 6489068 | Process for observing overlay errors on lithographic masks | — | 2002-12-03 |
| 6459480 | Measurement method of Zernike coma aberration coefficient | — | 2002-10-01 |
| 6399401 | Test structures for electrical linewidth measurement and processes for their formation | Harry J. Levinson | 2002-06-04 |