| 11749492 |
Mechanically-stable electron source |
Kun Liu, Alan Bahm |
2023-09-05 |
|
| 10410827 |
Gun lens design in a charged particle microscope |
Ali Mohammadi-Gheidari, Alexander Henstra, Peter Christiaan Tiemeijer, Kun Liu, Pleun Dona +1 more |
2019-09-10 |
$4,455,000 |
| 10325750 |
Collision ionization source |
Aurelien Philippe Jean Maclou Botman, Sean Kellogg, Leon van Kouwen, Luigi Mele |
2019-06-18 |
|
| 9899181 |
Collision ionization ion source |
Aurelien Philippe Jean Maclou Botman, Sean Kellogg, Leon van Kouwen, Luigi Mele |
2018-02-20 |
|
| 9627174 |
Multi species ion source |
N. William Parker |
2017-04-18 |
|
| 9530625 |
Method for attachment of an electrode into an inductively-coupled plasma |
Sean Kellogg, Anthony Graupera, William Parker, Andrew B. Wells, Mark W. Utlaut +3 more |
2016-12-27 |
|
| 9322209 |
Insulating window panel |
Ronald A. Greene |
2016-04-26 |
|
| 9224569 |
Multi species ion source |
N. William Parker |
2015-12-29 |
$19,124,000 |
| 9053895 |
System for attachment of an electrode into a plasma source |
Sean Kellogg, Anthony Graupera, N. William Parker, Andrew B. Wells, Mark W. Utlaut +3 more |
2015-06-09 |
$9,139,000 |
| 8779376 |
Determination of emission parameters from field emission sources |
Lynwood W. Swanson, Sean Kellogg, Kun Liu |
2014-07-15 |
$4,468,000 |
| 8736170 |
Stable cold field emission electron source |
Kun Liu |
2014-05-27 |
$6,252,000 |
| 8217565 |
Cold field emitter |
Theodore Carl Tessner, II, Lynwood W. Swanson |
2012-07-10 |
$13,072,000 |
| 8053725 |
Beam quality in FIB systems |
Jonathan H. Orloff |
2011-11-08 |
$12,210,000 |
| 7888654 |
Cold field emitter |
Theodore Carl Tessner, II, Lynwood W. Swanson |
2011-02-15 |
$4,489,000 |
| 7544523 |
Method of fabricating nanodevices |
Gerald G. Magera, Lawrence Scipioni |
2009-06-09 |
$3,118,000 |
| 7064477 |
Low power schottky emitter |
Gerald G. Magera, James B. McGinn, David S. Jun |
2006-06-20 |
$3,413,000 |
| 6977384 |
Shaped sputter shields for improved ion column operation |
James B. McGinn |
2005-12-20 |
$2,497,000 |
| 6798126 |
High angular intensity Schottky electron point source |
David S. Jun, Gerald G. Magera |
2004-09-28 |
$1,919,000 |
| 6771013 |
Low power schottky emitter |
Gerald G. Magera, James B. McGinn, David S. Jun |
2004-08-03 |
$2,911,000 |
| 6680562 |
Schottky emitter having extended life |
James B. McGinn, Sander Den Hartog, David S. Jun, Gerald G. Magera |
2004-01-20 |
$8,045,000 |