Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6717973 | Wavelength and bandwidth monitor for excimer or molecular fluorine laser | Dirk Basting, Juergen Kleinschmidt, Peter Lokai, Uwe Stamm | 2004-04-06 |
| 6690703 | Molecular fluorine laser system | Klaus Vogler, Gongxue Hua, Frank Voss, Elko Bergmann | 2004-02-10 |
| 6614828 | Wavelength selector for laser with adjustable angular dispersion | Dirk Basting | 2003-09-02 |
| 6614584 | Laser frequency converter with automatic phase matching adjustment | Evgueni Slobodchikov | 2003-09-02 |
| 6608852 | Gain module for diode-pumped solid state laser and amplifier | Alexander Wiessner | 2003-08-19 |
| 6563853 | Gas performance control system for gas discharge lasers | Peter Heist, Matthias Kramer, Juergen Kleinschmidt, Marcus Serwazi, Thomas Jünemann | 2003-05-13 |
| 6546037 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2003-04-08 |
| 6515741 | Optical device and method for line-narrowed excimer or molecular fluorine laser | Dirk Basting | 2003-02-04 |
| 6490305 | Beam delivery system for molecular fluorine (F2) laser | Klaus Vogler, Frank Voss, Rainer Patzel | 2002-12-03 |
| 6490306 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2002-12-03 |
| 6487229 | Beam delivery system for molecular fluorine (F2) laser | Klaus Vogler, Frank Voss, Rainer Patzel | 2002-11-26 |
| 6477192 | Device for on-line control of output power of vacuum-UV laser | Gongxue Hua | 2002-11-05 |
| 6463086 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2002-10-08 |
| 6463084 | Device for on-line control of output power of vacuum-UV laser | Gongxue Hua | 2002-10-08 |
| 6442182 | Device for on-line control of output power of vacuum-UV laser | Gongxue Hua | 2002-08-27 |
| 6426966 | Molecular fluorine (F2) laser with narrow spectral linewidth | Dirk Basting, Uwe Stamm | 2002-07-30 |
| 6393037 | Wavelength selector for laser with adjustable angular dispersion | Dirk Basting | 2002-05-21 |
| 6393040 | Molecular fluorine (F2) excimer laser with reduced coherence length | Uwe Stamm | 2002-05-21 |
| 6381256 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2002-04-30 |
| 6327290 | Beam delivery system for molecular fluorine (F2) laser | Klaus Vogler, Frank Voss, Rainer Patzel | 2001-12-04 |
| 6243406 | Gas performance control system for gas discharge lasers | Peter Heist, Matthias Kramer, Jürgen Kleinschmidt | 2001-06-05 |
| 6219368 | Beam delivery system for molecular fluorine (F2) laser | — | 2001-04-17 |
| 6172329 | Ablated laser feature shape reproduction control | Curtis L. Shoemaker, Daniel J. Treadwell, Berthold Burghardt | 2001-01-09 |
| 6154470 | Molecular fluorine (F.sub.2) laser with narrow spectral linewidth | Dirk Basting, Uwe Stamm | 2000-11-28 |
| 6061382 | Laser system and method for narrow spectral linewidth through wavefront curvature compensation | Dirk Basting | 2000-05-09 |